Finite element analysis of fluid behaviour under micro surface waves

Yanru Shi; Weimin Gao; Zhenxian Yu; Lingxue Kong; Hung-Yao Hsu

doi:10.1117/12.638365

19 January 2006 Finite element analysis of fluid behavior under micro surface waves

Yanru Shi, Weimin Gao, Zhenxian Yu, Lingxue Kong, Hung-Yao Hsu

Proceedings Volume 6036, BioMEMS and Nanotechnology II; 60360H (2006) https://doi.org/10.1117/12.638365
Event: Microelectronics, MEMS, and Nanotechnology, 2005, Brisbane, Australia

Abstract

The wide utilisation of micro-systems has brought increasing attention into micro-fluidics in recent years. When the size and mass of a device are scaled down, forces which used to be ignored may become dominant in the performance of a micro system. This paper studies the behaviour of fluid responding to travelling sinusoidal waves imposed by a micro actuator. The thickness of the fluid between the wave surface and the substrate is 20 microns, and the wavelength is 50 microns. The model is developed and implemented in ANSYS. The nonlinearities of the flow exist in both X and Y directions. A stable thrust force can be generated by the moving waves. The direction of the thrust force is opposite to the direction of the travelling wave. The magnitude of the thrust force is related to fluid viscosity, wave amplitude, and wave frequency. As this force is highly predictable and controllable, it can be used to propel a micro device working in thin tubes filled with fluid. The principle could also be applied to non-Newtonian fluid, although the flow will be more complicate.

Citation Download Citation

Yanru Shi, Weimin Gao, Zhenxian Yu, Lingxue Kong, and Hung-Yao Hsu "Finite element analysis of fluid behavior under micro surface waves", Proc. SPIE 6036, BioMEMS and Nanotechnology II, 60360H (19 January 2006); https://doi.org/10.1117/12.638365

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