Abstract
Tribological properties of optimized SU-8 micro-dot patterns on Silicon (Si) were evaluated using a flat-on-flat tribometer. Sliding tests on the patterns were conducted against a SU-8 spin-coated 2 × 2 mm2 Si substrate at varying normal loads at a fixed rotational speed. It was observed that the pitch of the SU-8 pattern on Si substrate had significant influence on the wear durability. Ultra-thin layer of perfluoropolyether was over-coated onto SU-8 micro-dot patterned specimens for enhanced wear durability, and the specimen of the optimized pitch 450 μm has shown a wear life of more than 100,000 cycles at a normal load of 650 mN.
Similar content being viewed by others
References
Williams, J.A., Le, H.R.: Tribology and MEMS. J. Phys. D Appl. Phys. 39, 201–204 (2006)
Van Spengen, W.M., Puers, R., De Wolf, I.: On the physics of stiction and its impact on the reliability of microstructures. J. Adhesion Sci. Technol. 17(4), 563–582 (2003)
Tas, N., Sonnenberg, T., Jansen, H., Legtenberg, R., Elwenspoek, M.: Stiction in surface micromachining. J. Micromech. Microeng. 6, 385–397 (1996)
Ashurst, W.R., Yau, C., Carraro, C., Maboudian, R., Dugger, M.T.: Dichlorodimethylsilane as an anti-stiction monolayer for MEMS: a comparison to the octadecyltrichlosilane self-assembled monolayer. J. Microelectromech. Syst. 10(1), 41–49 (2001)
Baumgart, P., Krajnovich, D.J., Nguyen, T.A., Tam, A.C.: A new laser texturing technique for high performance magnetic disk drives. IEEE Trans. Magn. 31, 2946–2951 (1995)
Gui, J., Marchon, B.: A stiction model for a head-disk interface of a rigid disk drive. J. Appl. Phys. 78(6), 4206 (1995)
Tay, N.B., Minn, M., Sinha, S.K.: Polymer jet printing of SU-8 micro-dot patterns on Si surface: optimization of tribological properties. Tribolo. Lett. 42, 215–222 (2011)
Li, X., Bhushan, B.: A review of nanoindentation continuous stiffness measurement technique and its applications. Mater. Charact. 48, 11–36 (2002)
Hertz, H.: On the contact of elastic solids. J. Reine. angew. Math. 92, 156–171 (1882)
Greenwood, J.A., Williamson, J.B.P.: The contact of nominally flat surfaces. Proc. Roy. Soc. A295, 300–319 (1966)
Al-Halhouli, A.T., Kampen, I., Krah, T., Büttgenbach, S.: Nanoindentation testing of SU-8 photoresist mechanical properties. Microelectron. Eng. 85, 942–944 (2008)
Myshkin, N.K., Petrokovets, M.I., Kovalev, A.V.: Tribology of polymers: adhesion, friction, wear, and mass-transfer. Tribol. Int. 38, 910–921 (2005)
Acknowledgment
The authors would like to acknowledge the financial support given to this study by the National Research Foundation (NRF), Singapore (Award No. NRF-CRP 2-2007-04).
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Tay, N.B., Minn, M. & Sinha, S.K. A Tribological Study of SU-8 Micro-Dot Patterns Printed on Si Surface in a Flat-on-Flat Reciprocating Sliding Test. Tribol Lett 44, 167 (2011). https://doi.org/10.1007/s11249-011-9835-1
Received:
Accepted:
Published:
DOI: https://doi.org/10.1007/s11249-011-9835-1