Abstract
Hearing aid devices are used by patients with hearing impairment to help with hearing problems. These devices consist of a microphone, an amplifier, and speaker modules. The author previously developed a micro-electromechanical piezoelectric diaphragm for a hearing aid device. The proposed diaphragm was in circular shape with 700 μm diameter and 10 μm thickness using AlN piezoelectric material. The design was performed in MEMS scale to offer maximum performance by the diaphragm for the human hearing frequency range. Adding to the previous work, in the present paper, a voltage amplifier circuit is designed for that piezoelectric microphone. The design is performed with respect to suitable circuit performance for the 5 Hz–22.5 kHz frequency range, small area, low noise, high gain and integration capability between the circuit and the diaphragm. The designed circuit is modeled and implemented in Cadence based on the 180 nm (0.18 μm) CMOS technology standard and the circuit layout is demonstrated with the circuit occupying an area of 0.08 mm × 0.04 mm. Simulation study is performed for assessment of the performance of the circuit. The results indicate that the frequency range of the amplifier covers the audio frequency of 5 Hz–22.5 k Hz, the amplification gain is 84.78 dB with the phase margine (PM) of 75.95°, the average power consumption of 0.216 mW, the Input noise level of 4.19 μVrms, CMRR of 133.69 dB and PSRR of 98.76 dB. The integration of the circuit with the microphone for hearing aid devices is proposed based on circuit binding method.
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References
Azadpour M (2013) Overview and challenges of implantable auditory prostheses. Basic Clin Neurosci 4:3–4
Baborowski J (2004) Microfabrication of piezoelectric MEMS. J Electroceramics 12:33–51
Bittencourt AG, Burke PR, Jardim IDS, Brito RD, Tsuji RK, Fonseca ACDO et al (2014) Implantable and semi-implantable hearing aids: a review of history, indications, and surgery. Int Arch Otorhinolaryngol 18:303–310
Deligoz I, Naqvi SR, Copani T, Kiaei S, Bakkaloglu B, Sang-Soo J et al (2011) A MEMS-based power-scalable hearing aid analog front end. Biomed Circ Syst IEEE Trans 5:201–213
El-Hoiydi A, Callias F, Oesch Y, Kuratli C, Kvacek R (2014) 18.1 A 1 V 3 mA 2.4 GHz wireless digital audio communication SoC for hearing-aid applications in 0.18 μm CMOS. In: 2014 61st IEEE International Solid-State Circuits Conference, ISSCC 2014, San Francisco, CA, 2014, pp 310–311
Garcia Mondelli MFC, Rocha AV, Honório HM (2013) Degree of satisfaction among hearing aid users. Int Arch Otorhinolaryngol 17:51–56
Grosh K, Littrell RJ (2013) Piezoelectric mems microphone. Google Patents
Gyo K, Yanagihara N, Saiki T, Hinohira Y (1990) Present status and outlook of the implantable hearing aid. Otol Neurotol 11:250–253
Haynes DS, Young JA, Wanna GB, Glasscock ME (2009) Middle ear implantable hearing devices: an overview. Trends Amplif 13:206–214
Israsena P, Isaradisaikul S, Noymai A, Boonyanukul S, Hemakom A, Chinnarat C et al (2013) Developing an appropriate digital hearing aid for low-resource countries: a case study. Sci World J. doi:10.1155/2013/549486
Johns DA, Martin K (2008) Analog integrated circuit design. Wiley, India
Kahue CN, Carlson ML, Daugherty JA, Haynes DS, Glasscock Iii ME (2014) Middle ear implants for rehabilitation of sensorineural hearing loss: a systematic review of fda approved devices. Otol Neurotol
Keidser G, Alamudi K (2013) Real-Life efficacy and reliability of training a hearing aid. Ear Hear 34:619–629
Ko WH, Rui Z, Ping H, Jun G, Xuesong Y, Young DJ et al (2009) Studies of MEMS acoustic sensors as implantable microphones for totally implantable hearing-aid systems. Biomed Circ Syst IEEE Trans 3:277–285
Laperuta EB, Fiorini AC (2012) Satisfaction of elderly individuals with hearing aids in the first six months of use. Jornal da Sociedade Brasileira de Fonoaudiologia 24:316–321
Lasak JM, Allen P, McVay T, Lewis D (2014) Hearing loss: diagnosis and management. Prim Care Clin Off Pract 41:19–31
Littrell RJ (2010) High performance piezoelectric MEMS microphones. The University of Michigan, USA
Mahmoud AF, Massa ST, Douberly SL, Montes ML, Ruckenstein MJ (2014) Safety, efficacy, and hearing preservation using an integrated electro-acoustic stimulation hearing system. Otol Neurotol 35:1421–1425
McPherson B (2014) Hearing assistive technologies in developing countries: background, achievements and challenges. Disabil Rehab Assist Technol 9:360–364
Park JH, Kim JH, Song Y-K, Jung Y, Hur S, Kim W et al (2013) Design of an analog front end for a bio-inspired auditory sensor of a novel totally implantable cochlear implant. Sens Mater 25:553–565
Paulick PE, Merlo MW, Mahboubi H, Djalilian HR, Bachman M (2014) A micro-drive hearing aid_ a novel non-invasive hearing prosthesis actuator. Biomed Microdev 16:915–925
Razavi B (2002) Design of analog CMOS integrated circuits. Tata McGraw-Hill Education, New Delhi
Sang-Soo J, Rivas F, Diaz RE, Jiuk K, Jeonghwan K, Bakkaloglu B et al (2009) A compact and low-cost MEMS loudspeaker for digital hearing aids. Biomed Circ Syst IEEE Trans 3:348–358
Suyog RM, Ketaki DP (2012) GASD: an aid for stone-deaf person. Int J Eng Sci Technol 4(4):1544–1552
Vujanic A, Pavelka R, Adamovic N, Kment C, Mitic S, Brenner W et al (2002) Development of a totally implantable hearing aid. In: Microelectronics, 2002. MIEL 2002. 23rd International Conference on 2002, pp 235–238
Williams MD, Griffin BA, Reagan TN, Underbrink JR, Sheplak M (2012) An AlN MEMS piezoelectric microphone for aeroacoustic applications. Microelectromech Syst J 21:270–283
Williger B, Lang FR (2014) Managing age-related hearing loss: how to use hearing aids efficiently - a mini-review. Gerontology 60(5):440–447
Yang C-T (2010) The sensitivity analysis of a MEMS microphone with different membrane diameters. J Mar Sci Technol 18:790–796
Young DJ, Zurcher MA, Semaan M, Megerian CA, Ko WH (2012) MEMS capacitive accelerometer-based middle ear microphone. IEEE Trans Biomed Eng 59:3283–3292
Zargarpour N, Zarifi MH (2014) A piezoelectric micro-electromechanical microphone for implantable hearing aid applications. Microsyst Technol 21(4):893–902
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Zargarpour, N., Abdi, H. & Bahador, H.J. Low-noise and small-area integrated amplifier circuit for mems-based implantable hearing aid applications. Microsyst Technol 23, 2965–2971 (2017). https://doi.org/10.1007/s00542-016-3166-y
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DOI: https://doi.org/10.1007/s00542-016-3166-y